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Chemistry of Atomic Layer Deposition

4834.000


Author Barry, Seán Thomas
ISBN 9783110712513
Published Language English
Publication Year 2022
Publisher De Gruyter
Binding Paperback
Original Price €74.95
Pages 105
Ships By 3-4 days

Description

This book will help chemists and non-chemists alike understand the fundamentals of surface chemistry and precursor design, and how these precursors drive the processes of atomic layer deposition, and how the surface-precursor interaction governs atomic layer deposition processes. The underlying principles in atomic layer deposition rely on the chemistry of a precursor with a surface.

Additional information

Author

,

ISBN

Published Language

Publication Year

Publisher

Binding

Original Price

Pages

105

Ships By

3-4 days