Description

This book deals with the subject of secondary energy spectroscopy in the scanning electron microscope (SEM). The SEM is a widely used research instrument for scientific and engineering research and its low energy scattered electrons, known as secondary electrons, are used mainly for the purpose of nanoscale topographic imaging. This book demonstrates the advantages of carrying out precision electron energy spectroscopy of its secondary electrons, in addition to them being used for imaging. The book will demonstrate how secondary electron energy spectroscopy can transform the SEM into a powerful analytical tool that can map valuable material science information to the nanoscale, superimposing it onto the instrument’s normal topographic mode imaging. The book demonstrates how the SEM can then be used to quantify/identify materials, acquire bulk density of states information, capture dopant density distributions in semiconductor specimens, and map surface charge distributions.